论文部分内容阅读
利用反应磁控溅射方法在单晶硅和高速钢(W18Cr4V)基片上制备出不同C含量Ti-B-C-N纳米复合薄膜.使用X射线衍射和高分辨透射电子显微镜研究了Ti-B-C-N纳米复合薄膜的组织和微观结构,用纳米压痕仪测试了它们的硬度和弹性模量.结果表明,利用往真空室通入C2H2气体的方法制备得到的Ti-B-C-N纳米复合薄膜中,在所研究成分范围内只发现TiN基的纳米晶.当C2H2流量较小时,C元素的加入可以促进Ti-B-C-N薄膜的结晶,使晶粒有所增大,力学性能得到提高;当晶粒尺寸约为6nm时(C2H2流量为2cm3/min),Ti-B-C-N薄膜的硬度、弹性模量和断裂韧性均达到最大值,分别为35.7GPa,363.1GPa和2.46MPa·m1/2;进一步增加C含量,薄膜力学性能将急剧降低.
Ti-BCN nanocomposite films with different C content were prepared by reactive magnetron sputtering on single-crystal silicon and high-speed steel (W18Cr4V) substrates. The X-ray diffraction and high resolution transmission electron microscopy were used to study the Ti-BCN nanocomposite films Microstructure and microstructure of the Ti-BCN nanocomposite films were tested by nano indenter.The results show that the Ti-BCN nanocomposite films prepared by introducing C2H2 gas into the vacuum chamber have the highest hardness and elastic modulus Only TiN-based nanocrystals were found.When the flow rate of C2H2 is small, the addition of C element can promote the crystallization of Ti-BCN thin films and increase the grain size and improve the mechanical properties. When the grain size is about 6nm, Flow rate of 2cm3 / min), the hardness, elastic modulus and fracture toughness of Ti-BCN thin films reach the maximum values of 35.7GPa, 363.1GPa and 2.46MPa · m1 / 2, respectively. When the content of C is further increased, the mechanical properties of the films will be sharp reduce.