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文章阐述了微电子技术及其化学品的国内外现状、发展趋势及“十五”发展目标 ,同时对目前微电子化学品的国际标准进行了详细的描述和分析。
This article describes the current situation and development trend of microelectronic technology and its chemicals at home and abroad, as well as the development target of “the Tenth Five-year Plan”. At the same time, the current international standards for microelectronic chemicals are described and analyzed in detail.