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提出一种使用自聚焦透镜构成的光强度调制的光学位移测量原理,利用发光二极管作光源,光从第一根自聚焦透镜发出,然后受到反射镜的反射而进入第二根自聚焦透镜,当反射镜有小位移时,进入第二根自聚焦透镜的光强度被调制,用光电管检测光强度的变化,可以确定位移的大小。根据该原理,位移分辨率的理论值可达10-9m,实验测量的位移分辨率为10-8m。该原理亦可用于测量小振动和压力等量。
An optical displacement measurement principle using light intensity modulation using a self-focusing lens is proposed. Light is used as a light source, and the light is emitted from the first self-focusing lens and then reflected by the reflecting mirror to enter the second self-focusing lens. When the self- When the mirror has a small displacement, the intensity of the light entering the second self-focusing lens is modulated, and the change of the light intensity is detected by a photoelectric tube to determine the magnitude of the displacement. According to this principle, the theoretical value of the displacement resolution can reach 10-9m, and the displacement resolution of the experimental measurement is 10-8m. The principle can also be used to measure small vibration and pressure equivalent.