近几年来随着集成电路工业的发展,掩模制造和检测需要对坐标进行高精度测量。随着从集成电路到大规模集成电路技术的进步,要求测量精度高于±0.3微米。本文先介绍有关激光干涉坐标测量仪的主要组成部分,然后概述其自动化现状。一、激光干涉坐标测量仪的构造激光干涉坐标测量仪是由作为一种测长 In recent years with the development of the integrated circuit industry, the manufacturing and testing of masks require high-precision measurement of coordinates. With the progress from integrated circuits to large scale integrated circuit technology, the measurement accuracy is required to be higher than ± 0.3 μm. This article first introduces the major components of laser interferometry coordinate measuring machines and then outlines the status of their automation. First, the laser interferometer coordinate measuring instrument structure Laser interferometer coordinate measuring instrument is used as a measuring length