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匀胶设备是光刻工艺中不可缺少的重要设备 ,设备的运转情况直接影响到匀胶及光刻片的质量。本文重点讨论了转动组件的设计及唇形密封圈的应用
Even glue equipment is an indispensable and important equipment in lithography process. The operation of equipment directly affects the quality of glue and photolithography. This article focuses on the design of rotating components and the application of lip seals