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对版图扫描场分割方式进行了研究，详细论述了ｍ ×ｎ Ｓ形扫描场分割方式和任意扫描场分割方式。
The research on the segmentation of the layout field is discussed in detail, and the m × n S-shaped scanning field segmentation method and the arbitrary scanning field segmentation method are discussed in detail.