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微器件装配技术是实现组合结构的微机械电子学系统(MEMS)的关键技术之一,精密工作台系统则是微装配系统的一个重要组成部分。精密工作台系统包括粗动工作台和微动工作台:粗动工作台包括精密机械及其传动系统、光栅定位系统、直流力矩电机驱动系统及计算机控制系统;微动工作台包括微动台、压电陶瓷驱动电源和电感测微移。实验结果表明,粗动台系统的最高速度为5mm/s,最低速度为3.4μm/s,系统的重复定位精度为±1μm;微动台系统的定位精度可达到±1μm。
Micro-device assembly technology is one of the key technologies of MEMS (Micro-Electro-Mechanical Systems) with a combined structure. Precision bench system is an important part of micro-assembly system. Precision worktable system includes coarse worktable and fine worktable: coarse worktable includes precision machine and its drive system, grating positioning system, DC torque motor drive system and computer control system; Piezoelectric ceramic drive power and inductance micrometer shift. The experimental results show that the maximum speed of the coarse motion table system is 5mm / s, the minimum speed is 3.4μm / s, the repeatability of the system is ± 1μm and the precision of the micro-motion stage system is ± 1μm.