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基于厚膜工艺,研制了一种集成有进样接口、气路接口、温控元件和离子源固定装置等外围功能模块的高集成度FAIMS迁移管,阐述了其结构特征和制作方法。为验证其性能,搭建了相应的FAIMS外围检测平台,以丙酮和甲苯为样品进行实验,得到了它们的FAIMS谱图,并与基于MEMS工艺的非集成FAIMS迁移管所测得的丙酮和甲苯的谱图比较,证明了高集成度迁移管在功耗、漏电流、气密性、灵敏度、分辨率和稳定性等方面的优异性能,说明高集成度迁移管适合作为小型化FAIMS独立检测系统的核心器件。
Based on the thick film technology, a highly integrated FAIMS drift tube integrated with peripheral modules such as inlet interface, gas interface, temperature control element and ion source fixing device was developed. Its structure characteristics and fabrication method were described. In order to verify its performance, a corresponding FAIMS peripheral testing platform was set up. The acetone and toluene samples were used for the experiments. Their FAIMS spectra were obtained and compared with acetone and toluene measured by a MEMS-based non-integrated FAIMS drift tube The spectrogram comparison proves the excellent performance of the highly integrated drift tube in terms of power consumption, leakage current, air tightness, sensitivity, resolution and stability, indicating that the highly integrated mobility tube is suitable as a miniaturized FAIMS independent detection system Core device