设计了一种阵列波导光栅解调集成系统中的8通道Si纳米线阵列波导光栅波分复用器。根据材料的折射率设计了单模波导截面尺寸,利用光束传播法对所设计阵列波导光栅进行了模拟。结果表明,器件尺寸为200μm×219μm,远小于目前技术较成熟的硅基SiO2的尺寸,光功率分布符合高斯分布,信道间隔为1.8nm,串扰小于-21dB。对小尺寸AWG的设计具有参考意义。 An 8-channel Si nanowire arrayed waveguide grating wavelength division multiplexer is designed in an arrayed waveguide grating demodulation integrated system. According to the refractive index of the material, the cross-sectional dimension of the single-mode waveguide was designed. The designed waveguide array was simulated by the beam propagation method. The results show that the size of the device is 200μm × 219μm, which is much smaller than the size of the silicon-based SiO2 with the current technology. The optical power distribution conforms to the Gaussian distribution with a channel spacing of 1.8nm and a crosstalk of less than -21dB. The design of small size AWG has a reference value.