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Low dielectric interlayer films have become an important element to ensure the development of the microelectronics industry.A kind of flexible interlayer dielectrics,polyarylene ether nitrile/bisphenol A cyanate ester (PEN/BADCy) film,with good thermal stability and low frequency dependence,has been developed by solution casting method.Herein,materials were designed to incorporate bisphenol A cyanate ester as a part of blend,contributing to the frequency stability and structural integrity.The morphological study combined with electron microscopy revealed the uniform and flexible microstructure information with controllable morphology through self-polymerization of cyanate esters with different prepolymerization time and curing temperatures.The dielectric films could present high thermal stability with Tg ＞ 180 ℃.Significant improvement in the dielectric properties was achieved for the dielectric constant and loss was much stabler than neat PEN over the frequency range from 100 Hz to 5 MHz.When the prepolymerization time was 3 h and final curing temperature reached 230 ℃,the dielectric constant and dielectric loss of the films were 3.36 and 0.013 at 100 kHz,respectively.The dimensional stability (CTE =53.67 × 10-6 K-1) was confirmed and considered beneficial to use as an interlayer dielectrics.