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To obtain high reliability of surface acoustic wave(SAW)devices,Mo was added to Al electrodes on 128°Y-X LiNbO_3 substrates by a d.c.magnetron sputtering deposition.Influence of Mo additive on the mechanical properties of Al films was investigated.It was found that the Al-Mo alloy films displayed a superior adhesion to substrates.With the Al-Mo alloy films,a 1.65 GHz-range image-impedance connected SAW filter was designed and fabricated.In this structure of SAW filter, for satisfying stopband requirements a dual-track structure was applied.Withdrawal weighting of interdigital transducers(IDT) was used to adjust the bandwidth of SAW filter.
Moment added to Al electrodes on 128 ° YX LiNbO_3 substrates by a dcmagnetron sputtering deposition. Effect on Mo additive on the mechanical properties of Al films was investigated. It was found that the Al-Mo alloy films displayed a superior adhesion to substrates.With the Al-Mo alloy films, a 1.65 GHz-range image-impedance connected SAW filter was designed and fabricated. In this structure of SAW filter, for satisfying stopband requirements a dual -track structure was applied.Withdrawal weighting of interdigital transducers (IDT) was used to adjust the bandwidth of SAW filter.