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采用真空蒸发技术在聚酰亚胺、云母、陶瓷等基板上制作了镱薄膜传感器 ,研究了该传感器在 70MPa～ 2GPa范围内准静态单轴压缩载荷下电阻—压力的变化关系。结果表明该传感器精度高、重复性好、工艺简单
The ytterbium thin film sensor was fabricated on polyimide, mica, ceramic and other substrates by vacuum evaporation technique. The relationship between the resistance and pressure was investigated under the quasi-static uniaxial compressive load of 70MPa ~ 2GPa. The results show that the sensor has high precision, good repeatability and simple process