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本发明系一种生产微型压力传感器的工艺。利用该工艺生产的传感器的主要特点是在使用中耐高温。这种传感器的敏感膜片具有一定的形状,以便能集中和限制敏感区内产生的应力,并将这一应力引向传感器内检测压差的敏感元件。
The present invention is a process for producing a miniature pressure sensor. The main features of the sensor produced using this process are high temperature resistance in use. The sensitive diaphragm of such a sensor has a shape that concentrates and limits the stresses generated in the sensitive area and directs this stress to the sensor that detects the pressure differential within the sensor.