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为了了解热驱动薄膜式微型泵的性能，对泵的主要部件进行了分析，然后对泵的整体性能进行了模拟。得到了微型泵的频率特性及流量随功率的变化。发现泵的流量在 ３．３ Ｈｚ左右达到最大。膜片的预应力对泵的性能有重要影响。功率小时，预应力使流量降低，功率大时，预应力使流量增加。泵的流量与输入功率的比值与输入功率的关系曲线有最大值，约在 １．２～１．８ Ｗ之间。实验测定了微型泵的频率和功率特性，模拟结果与实测结果基本吻合。
In order to understand the performance of the heat-driven membrane micropump, the main components of the pump were analyzed and then the overall performance of the pump was simulated. The frequency characteristics and flow rate of the micropump are obtained with the change of power. The pump flow was found to reach maximum at about 3.3 Hz. Diaphragm pre-stress has a significant impact on the performance of the pump. When the power is small, the pre-stress reduces the flow rate. When the power is large, the pre-stress increases the flow rate. Pump flow and input power ratio and the input power curve has a maximum, about between 1.2 ~ 1.8W. The frequency and power characteristics of the micropump were experimentally determined, and the simulation results were in good agreement with the measured results.