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精确测量出每道加工工序残留的亚表面损伤深度值是达到光学元件加工质量要求的前提保证。通过磁流变抛光斑点法测量几种常用的加工方法对氟化镁试样加工后产生的亚表面损伤深度数值,为将来该材料实际工件加工提供参考。
Accurately measuring the residual sub-surface damage depth value of every machining operation is the prerequisite to meet the requirements of optical components processing quality. Magneto-rheological polishing spot method to measure several commonly used method of processing magnesium fluoride samples generated after sub-surface damage depth values for the future of the material processing of the actual reference to provide reference.