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目的确定适当的负偏压,提高多弧离子镀氮化钛薄膜的综合性能。方法采用不同的负偏压,在4Cr13不锈钢表面制备Ti N薄膜,探讨偏压对薄膜表面质量、结构、硬度、结合力和摩擦系数的影响。结果负偏压对薄膜表面质量的影响较大:负偏压为0 V时,Ti N薄膜表面凹凸不平,液滴较多;随着负偏压升高,薄膜表面变得光滑,液滴减少并变小,薄膜致密性也得到提高。在不同负偏压下,Ti N薄膜均呈现出在(111)晶面的择优取向,但随着负偏压的增大,这种择优取向逐渐减弱,当负偏压达到400 V时,薄膜在(220)晶面的峰值逐渐增强。随着负偏压从0增至400 V,薄膜的硬度、结合力和耐磨性均先提高,后降低。当负偏压为300 V时,薄膜的硬度和结合力达到最大,分别为2650HV和58 N;摩擦系数和磨损量最小,分别为0.48和0.1065 mm3。结论施加适当的负偏压可以提高薄膜的硬度、结合力、耐磨性等性能,当负偏压为300 V时,薄膜的各项性能达到最佳。
Objective To determine the appropriate negative bias to improve the overall performance of multi-arc ion plating titanium nitride film. Methods Different negative bias voltages were used to prepare TiN films on the surface of 4Cr13 stainless steel to investigate the influence of bias voltage on the surface quality, structure, hardness, cohesion and friction coefficient. Results Negative bias had a significant effect on the surface quality of the films. When the negative bias voltage was 0 V, the surface of TiN film was uneven with more droplets. With the increase of negative bias voltage, the film surface became smooth and the droplet size decreased And smaller, the film density has also been improved. Under different negative bias voltages, TiN thin films show the preferred orientation at the (111) crystal plane. However, with the increase of the negative bias voltage, the preferred orientation gradually decreases. When the negative bias voltage reaches 400 V, The peak at (220) plane gradually increases. As the negative bias increases from 0 to 400 V, the hardness, adhesion and wear resistance of the film increase first and then decrease. When the negative bias voltage is 300 V, the hardness and cohesion of the films reach the maximum, which are 2650 HV and 58 N, respectively. The friction coefficient and wear amount are the smallest, 0.48 and 0.1065 mm3 respectively. Conclusion Appropriate negative bias can improve the film’s hardness, adhesion, wear resistance and other properties, when the negative bias voltage of 300 V, the film to achieve the best performance.