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反射差分光谱仪是一种测量灵敏度和精度较高的研究表面/界面的新型分析仪器,但微弱的反射差分信号易受到各种噪声的干扰.作者利用Jones表示法,对光弹调制式反射差分光谱仪构建了包含器件自身缺陷和安装误差的数学模型,通过确立误差源与测量结果的联系,分析出各误差源对测量结果的影响,特别是起偏器、光弹调制器和样品的安装误差以及位相调制误差,这些系统误差经过标定可得到补偿.
Reflected differential spectrometer is a new type of analytical instrument for measuring the surface / interface with higher sensitivity and accuracy, but the faint reflected differential signal is easily disturbed by various noises. Using the Jones method, The mathematical model including the self-defect and the installation error of the device is constructed. By establishing the relationship between the error source and the measurement result, the influence of each error source on the measurement result is analyzed, especially the installation error of the polarizer, the photoelastic modulator and the sample, Phase modulation error, these systematic errors can be calibrated to be compensated.