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Quantitative optical measurements of deep subwavelength,three-dimensional (3D),nanometric structures with sensitivity to sub-nanometer details address a ubiquitous measurement challenge.A Fourier domain normalization approach is used in the Fourier optical imaging code to simulate the full 3D scattered light field of nominally 15 nm-sized structures,accurately replicating the light field as a function of the focus position.Using the full 3D light field,nanometer scale details such as a 2 nm thin conformal oxide and nanometer topography are rigorously fitted for features less than one-thirtiethof the wavelength in size.The densely packed structures are positioned nearly an order of magnitude closer than the conventional Rayleigh resolution limit and can be measured with sub-nanometer parametric uncertainties.This approach enables a practical measurement sensitivity to size variations of only a few atoms in size using a high-throughput optical configuration with broad application in measuring nanometric structures and nanoelectronic devices.