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用308nm准分子激光辐照TiO2薄膜样品，对辐照前后的薄膜样品分别进行了XPS、XRD的对比测试和显微分析，确定了TiO2薄膜样品的性质变化是由于激光辐照使其表面快速升温熔化和快速降温凝固，导致了晶格中部分氧原子的缺位，引起了化学配比偏离。
By using 308nm excimer laser to irradiate TiO2 thin film samples, the XPS and XRD contrast tests and microscopic analysis of the thin film samples before and after irradiation were carried out respectively. The change of the properties of the TiO2 thin film samples was determined by laser irradiation, Melting and rapid cooling and solidification, resulting in the absence of some oxygen atoms in the lattice, causing the deviation of the chemical ratio.