论文部分内容阅读
研究了气体流量比 (O2 /C2 H2 )对燃焰法沉积金刚石厚膜的影响 ,并以约 5 0 μm /h的较高速率沉积出了均匀、致密呈淡黄色透明状的高质量金刚石厚膜
The effect of gas flow ratio (O2 / C2 H2) on the thick diamond film deposited by the flame combustion method was studied. A uniform, dense, yellowish transparent diamond of high quality was deposited at a relatively high rate of about 50 μm / h membrane