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一、引言 随着大规模集成电路的发展,器件尺寸不断缩小。在许多器件中,局部电场可以很高,载流子能被显著加速。载流子通过器件的渡越时间可和能量弛豫时间相近,在这种情形下漂移速度过冲不可避免。这时,传统的稳态输运理论不再适用,因为这种理论把速度看作瞬时电场的函数。Monte Carlo方法由于计算量大,目前还难以实际应用于器件模拟。因此,希望发展基于宏观描述的非稳态输运的方法,以节省计算机时间,开发实用化的模拟程序。
I. INTRODUCTION With the development of large-scale integrated circuits, the device size has been shrinking. In many devices, the local electric field can be high and carriers can be significantly accelerated. Carrier transit time can be similar to the energy relaxation time, in which case drift speed overshoot is unavoidable. At this time, the traditional theory of steady-state transport is no longer applicable, because the theory of speed as a function of instantaneous electric field. Monte Carlo method due to the large amount of computation, is currently difficult to actually applied to device simulation. Therefore, we hope to develop a method based on macroscopic description of unsteady transport in order to save computer time and develop practical simulation programs.