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介绍了一种静电驱动、电容检测单自由度硅微振动角速度传感器实验样机的结构、工作原理、加工方法、驱动方法、检测方法和实验结果。实验结果表明,该角速度传感器实验样机已具有一定的性能,其灵敏度为:3.2mV/(o·s-1);量程为:±500o/s;线性度:1%。
This paper introduces the structure, working principle, processing method, driving method, testing method and experimental results of an electrostatic driving and capacitance testing prototype of single degree of freedom silicon micro-vibration angular velocity sensor. The experimental results show that the experimental prototype of the angular velocity sensor has a certain performance with the sensitivity of 3.2mV / (o · s-1), the range of ± 500o / s and the linearity of 1%.