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纳米压印掩膜复制缩减光刻拥有成本随着纳米压印光刻很好地解决了分辨率的问题,关注的焦点转移到了拥有成本(CoO)上。本文重点研究了掩膜成本,包括一种称为“掩膜复制”的方
Nano-imprint mask replication reduces lithography cost of ownership With nanoimprint lithography resolving resolution issues well, the focus has shifted to cost of ownership (CoO). This article focuses on mask costs, including a technique called “mask copy”