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本文所提出的红外辐射探测器是由具有同一个辐射接收面、6对热电偶串联而成.所选用的热电材料为具有高优值系数的Bi2Te3-Bi2Se3-Sb2Te3三八式赝元热电合金材料.通过器件尺寸的优化,取得了较高的灵敏度.文中系统阐述了探测器的制作工艺和器件性能。
The infrared radiation detector proposed in this paper consists of six pairs of thermocouples connected in series with the same radiation receiving surface. The chosen thermoelectric material is a Bi2Te3-Bi2Se3-Sb2Te3 38-type pseudopotential thermoelectric alloy with high merit coefficient. Through the optimization of device size, high sensitivity has been achieved. The article systematically describes the detector manufacturing process and device performance.