电子探针分析时,电子的加速电压的选择似乎很简单,易被忽视.然而,选择得当对提高检测灵敏度、定量分析的空间分辨率以及定量分析的精确度等都具有重要意义,是一项应该认真掌握的分析技术.本文较系统地介绍了有关选择加速电压的依据和方法,并在某些方面作了新的尝试,提出一些新的见解. In electron probe analysis, the choice of the accelerating voltage of electrons seems to be very simple and easily overlooked. However, the proper selection is of great importance for improving the detection sensitivity, the spatial resolution of quantitative analysis and the accuracy of quantitative analysis We should carefully grasp the analytical techniques.This paper systematically introduces the basis and method of selecting accelerating voltage, and in some aspects made a new attempt to put forward some new insights.