论文部分内容阅读
对大尺寸试件的圆柱度误差的超精测量，仪器的测量基准误差不能忽略．如何分离出基准本身的形状误差及基准之间的位置误差是长期存在的难题．本文首次提出一种可分离出基准间的平行度误差以及直行基准的形状误差的方法，即反向法，从而较圆满地解决了这一问题．利用该方法建立的模型可用于重要试件圆柱度误差的超精测量中．该技术对超精密车床的研制提供了依据．
For large-size specimen of the cylindricity error of the ultra-precision measurement, the instrument’s measurement reference error can not be ignored. How to separate the shape error of the reference itself and the position error between the reference is a long-standing problem. This paper presents for the first time a method that separates the parallelism error between datums and the shape error of a straight datum, ie, the inverse method, to solve this problem satisfactorily. The model established by this method can be used in the hyperfine measurement of the cylindricity error of the important specimen. The technology provides the basis for the development of ultra-precision lathes.