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研究了以H_2O_2为氧化剂,不同的pH值(2,4,6,8,10)对Ru的去除速率(vRu)和静态腐蚀速率(vSER)的影响,同时用电化学的方法研究了H_2O_2和pH值对Ru表面的动态极化曲线的影响,利用原子力显微镜对每次抛光前后的微观形貌进行了观察。实验结果表明:随着pH值的逐渐增大,Ru的去除速率和静态腐蚀速率也会随之升高,碱性条件下的vRu和vSER明显高于酸性条件。当pH值为2时,Ru表面生成致密的钝化层,阻碍了化学作用,vRu(0.31 nm/min)和vSER(0nm/min)最低;当pH值为4和6时,会生成可溶性的RuO_4,提高了化学作用,vRu和vSER相对提高;当pH值为8和10时,生成RuO_4~(2-)和RuO_4~-化学作用明显,vRu和vSER显著提高;当pH值为10时,vRu(23.544 nm/min)和vSER(2.88 nm/min)最高。同时,随着pH值的逐渐增大,Ru表面的腐蚀电位(Ecorr)不断减小,腐蚀电流密度(Icorr)不断增大,当pH值为10时,Ecorr达到最低值(0.094 V),Icorr为最高值(1.37×10~(-3)A/cm~(-2))。
The effects of H 2 O 2 as oxidant, different pH values (2, 4, 6, 8 and 10) on the vRu and the static corrosion rate (vSER) of Ru were studied. The effects of H 2 O 2 and The effect of pH value on the dynamic polarization curve of Ru surface was observed by atomic force microscopy. The experimental results show that with the increase of pH value, the removal rate of Ru and the static corrosion rate also increase. The vRu and vSER under alkaline conditions are obviously higher than those under acidic conditions. At pH 2, a dense passivating layer was formed on the surface of Ru, hindering the chemical effect, with vRu (0.31 nm / min) and vSER (0 nm / min) being the lowest. At pH 4 and 6, soluble RuO 4 increased the chemical reaction and vRu and vSER increased relatively. When the pH was 8 and 10, RuO 4 2- and RuO 4 2- formed obvious chemical reaction and vRu and vSER increased significantly. When the pH was 10, vRu (23.544 nm / min) and vSER (2.88 nm / min) were the highest. At the same time, with the increase of pH, the corrosion potential (Ecorr) of Ru surface decreases and the corrosion current density (Icorr) increases. When the pH value is 10, the Ecorr reaches the lowest value (0.094 V), Icorr The highest value (1.37 × 10 -3 A / cm -2).