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本文报道了平面结构正面进光高速GaInAs/InP平面PIN光电二极管(使用Si-InP衬底)。该器件具有高的稳定性(在150℃下经1440小时高温老化后,暗电流无变化),大带宽(15GHz),高响应度(在1.3μm波长下,响应度为0.94A/W)。
This paper reports the planar front-side GaInAs / InP planar PIN photodiode (using Si-InP substrate). The device has high stability (no change in dark current after aging at 150 ° C for 1440 hours), high bandwidth (15GHz), high responsivity (responsivity of 0.94 A / W at 1.3 μm wavelength ).