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化学机械抛光中,抛光垫的材料特性是影响抛光效率和光亮度的重要因素之一。聚氨酯抛光垫通常由聚氨酯和无纺布复合制备而成。具有微结构可调性能的聚氨酯抛光垫由改进后的两步法制得,无纺布浸渍聚氨酯浆料后,部分溶剂在水浴中去除,然后在烘箱中去除剩余溶剂。改进后工艺的预凝聚温度、预凝聚时间、浆料浓度等参数获得了优化,并研究了其对抛光垫结构、性能的影响。改进后的方法使聚氨酯与无纺布纤维紧密结合,既保证了纤维之间孔隙的存在,又增加了材料的强度,在不损失材料硬度的前提下,显著提高了产品的透水性,并有利于打磨效率的提高。与此同时,该方法可以有效减少有机溶剂的使用,大幅缩减生产成本,具有节能、环保的特点。
In chemical mechanical polishing, the material characteristics of the polishing pad are one of the important factors that affect the polishing efficiency and the brightness. Polyurethane polishing pad is usually made of polyurethane and non-woven composite prepared. The polyurethane polishing pad with adjustable microstructure was prepared by the improved two-step method. After the non-woven fabric was impregnated with the polyurethane slurry, part of the solvent was removed in a water bath and the remaining solvent was removed in an oven. The parameters such as pre-aggregation temperature, pre-aggregation time and slurry concentration of the improved process were optimized, and the effects on the structure and performance of the polishing pad were studied. The improved method makes the polyurethane and the non-woven fabric fiber tightly combine, which not only ensures the existence of the pores between the fibers but also increases the strength of the material and significantly increases the water permeability of the product without losing the hardness of the material. Benefit to improve the efficiency of grinding. At the same time, this method can effectively reduce the use of organic solvents, significantly reduce production costs, with energy saving, environmental protection features.