本文设计并研制了一套可控制抛光作用力的精密抛光装置，该装置具有抛光作用力微调功能及显示功能。用该装置对Ｚｅｒｏｄｕｒ陶瓷玻璃进行控制力抛光实验，稳定地获得了具有纳米级及亚纳米级表面粗糙度的超光滑表面，将该装置与机械化学抛光方法结合使用，可高效地加工出表面无损伤的超光滑基片。 In this paper, a set of precision polishing device that can control the polishing force is designed and developed. The device has the function of polishing fine-tuning and display. With this device, Zerodur ceramic glass was subjected to controlled force polishing experiment to obtain an ultra-smooth surface with nano-scale and sub-nano-scale surface roughness. By combining the device with the mechanochemical polishing method, the surface can be efficiently worked out Damaged super-smooth substrate.