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本文给出了静电堵漏会切装置中等离子体密度与磁场平方成正比的实验结果,证明了密度定标律是正确的。测得的最大平均密度为5.6×10~(11)cm~(-3),约束时间为3～5ms。用多栅分析器测量了电子和离子能谱。实验中发现存在两种离子温度,典型结果为80eV和140eV,阳极区的电位下降约-184V,最后对实验结果进行分析和讨论。
In this paper, we present the experimental results that the plasma density in the device is proportional to the square of the magnetic field. It is proved that the calibration law of density is correct. The maximum average density is 5.6 × 10 ~ (11) cm ~ (-3) and the restraint time is 3 ~ 5 ms. The multi-gate analyzer was used to measure the electron and ion spectra. Two kinds of ion temperatures were found in the experiment. The typical results were 80eV and 140eV. The potential of the anode region decreased about -184V. Finally, the experimental results were analyzed and discussed.