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为了满足高密度母盘刻录的需要,对母盘刻录中的二级定位(two-stagepositioning)方法进行了研究,采用了直流电机驱动粗定位和压电陶瓷微型驱动精定位相结合的方式。使用双频激光干涉仪检测精定位工作台的位置,并引入比例增益K估计精定位工作台的位移增量,以估算粗定位工作台位置。对二级定位系统的PID控制方式进行了研究,合理选择了控制参数。仿真实验结果表明,PID控制下的二级定位系统对于10nm的阶跃响应的上升时间为20ms,稳态误差绝对值小于0.1nm,可见采用该二级定位方法的系统有快速的定位响应和很高的定位精度,可以满足高密度母盘刻录的需要。
In order to meet the need of high-density mastering, the two-stagepositioning method in mastering was studied, and the combination of coarse positioning by DC motor and fine positioning by piezoelectric micro-driver was adopted. The dual-frequency laser interferometer is used to detect the position of the fine positioning table and the proportional gain K is used to estimate the incremental displacement of the fine positioning table to estimate the coarse positioning table position. The PID control method of two-level positioning system is studied and the control parameters are selected reasonably. Simulation results show that the PID control of the two-stage positioning system for the 10nm step response rise time of 20ms, the steady-state error of less than 0.1nm absolute, we can see the use of the two-stage positioning system has rapid positioning response and very High positioning accuracy, to meet the needs of high-density master recording.