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基于CE-3极紫外(EUV)相机最高工作温度为70℃的要求,对EUV相机的微通道板(MCP)位置灵敏阳极光子计数成像探测器实验件在70℃时的性能进行了研究,该探测器主要由工作在脉冲计数模式下的MCP堆、楔条形感应电荷阳极及相关的模拟和数据处理电路组成。为了获得稳定的MCP堆电子增益及较小的暗计数率,对MCP堆进行了预处理,包括380℃条件下真空高温烘烤18h,以及电子清刷100μA·h,并测量了预处理前后暗计数率;测量了探测器工作在室温和70℃时的暗计数率、空间分辨率、增益,测量结果表明探测器的空间分辨率为5.66lp/mm,与室温下空间分辨率相同,暗计数率虽然小于1counts/(s·cm2),但70℃暗计数率是室温的2~5倍;对探测器的使用寿命进行了初步分析。实验结果和分析表明探测器在空间分辨率、暗计数率、使用寿命等方面均满足EUV相机的要求。
Based on the requirement of the maximum operating temperature of CE-3 EUV camera is 70 ℃, the performance of the sensitive anode photon counting imaging detector for microchannel plate (MCP) of EUV camera was studied at 70 ℃ The detector mainly consists of an MCP stack operating in a pulse counting mode, a wedge-shaped inductive charge anode and related analog and data processing circuits. In order to obtain a stable MCP stack electronic gain and a small dark count rate, the MCP stack was pretreated, including vacuum high temperature baking at 380 ℃ for 18h and electronic brushing 100μA · h, The results show that the spatial resolution of the detector is 5.66lp / mm, which is the same as the spatial resolution of the detector at room temperature. The dark count Although the rate is less than 1counts / (s · cm2), the dark count rate at 70 ℃ is 2 ~ 5 times of that at room temperature. The service life of the detector is analyzed preliminarily. Experimental results and analysis show that the detector meets the requirements of EUV cameras in terms of spatial resolution, dark count rate, and service life.