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在半导体设备当中投影光刻机应是最为精密复杂的设备,其维修工作具有高度的技术性。论述了NSR1755i7A投影光刻机自动对准系统的工作原理,并分析了两例自动对准系统故障和排除故障的过程,最后提出对此类故障检查的一般原则。
Among the semiconductor equipment projection lithography machine should be the most sophisticated equipment, the maintenance work is highly technical. The working principle of NSR1755i7A automatic alignment system for projection lithography is discussed. Two cases of automatic alignment system fault and troubleshooting are analyzed. Finally, the general principle of such fault inspection is proposed.