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搭建了一套基于Photo-CELIV测量载流子迁移率的实验系统。采用Nd~(3+):YAG脉冲激光器作为诱导光源,在1~20 Hz的工作频率下,实验系统可输出波长为532 nm、脉宽为10 ns的激光脉冲,其能量在0.1~1 mJ范围内可调,光斑直径小于2 mm,激光器持续工作5 h后的能量不稳定度为±8%。该研究为半导体材料载流子迁移率的测量提供了一定的参考。
A set of experimental system based on Photo-CELIV to measure the carrier mobility was built. Nd: (3 +): YAG pulsed laser is used as the light source. At the operating frequency of 1 ~ 20 Hz, the experimental system can output a laser pulse with a wavelength of 532 nm and a pulse width of 10 ns with an energy of 0.1 ~ 1 mJ The range is adjustable, the spot diameter is less than 2 mm, and the energy instability of the laser after 5 h continuous operation is ± 8%. This study provides a reference for the measurement of carrier mobility in semiconductor materials.