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综述了ZAO透明导电薄膜的光电特性及其导电机理、制备技术与研究现状,认为ZAO薄膜在平板显示、太阳能电池和低辐射器件领域具有广泛的应用前景,要达到工业应用还需对一些关键问题进行系统的研究。
The optoelectronic properties of ZAO transparent conductive films and their conductive mechanism, preparation techniques and research status are reviewed. ZAO thin films are widely used in the fields of flat panel display, solar cells and low-emission devices. To achieve industrial applications, some key issues Conduct systematic research.