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由于光学塑料在耐热性、耐吸湿性和表面强度等方面的特性比光学玻璃差,所以在光学塑料棱镜表面上镀制金属反射膜存在着金属膜层和塑料棱镜表面附着性能差的问题,镀膜后的塑料棱镜不易达到使用的技术要求。本文通过对镀膜材料和光学塑料基体的特性分析,提出了一种实用的介质加金属三层反射膜系。基于这种膜系采用了等离子辅助镀膜技术和石英晶片监控膜厚的方法,并且针对塑料棱镜蒸镀的特殊性,严格控制蒸镀条件中的有关参数,形成了一套稳定的蒸镀工艺。实验结果表明,光学塑料棱镜镀制金属反射膜可以解决膜层性能差的问题,满足光学产品的技术要求,实现批量生产。
Since optical plastics have poor heat resistance, hygroscopicity, and surface strength characteristics compared with optical glass, there is a problem that the metal reflective film is plated on the surface of the optical plastic prism and the adhesion properties of the metal film and the plastic prism are poor. After coating the plastic prism is not easy to use the technical requirements. Based on the analysis of the properties of the coating material and the optical plastic substrate, a practical medium plus metal three-layer reflective film system is proposed. Based on this film system using plasma-assisted coating technology and quartz wafer monitoring film thickness method, and for the particularity of the plastic prism evaporation, strict control of the parameters of the evaporation conditions, the formation of a stable evaporation process. Experimental results show that the optical plastic prism plated metal reflective film can solve the problem of poor film performance to meet the technical requirements of optical products to achieve mass production.