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用射频磁控溅射制备Zn_(1-x)Mg_xO薄膜,通过对不同溅射功率制备的薄膜结构和薄膜的室温透射谱和光致发光光谱的分析,得到溅射功率对薄膜结构和形貌的和光学性能的影响。
The Zn_ (1-x) Mg_xO thin films were prepared by RF magnetron sputtering. The sputtering power and the morphology of the films were obtained by analyzing the TEM and PL spectra of the films prepared by different sputtering powers. And optical performance.