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用射频偏压磁控溅射法 ,在水冷透明聚脂胶片上制备出了附着力强的ZnO :Al (AluminiumdopedZincOxide ,AZO)透明导电膜 ,膜的最小电阻率为 1.11× 10 -3 Ωcm ,薄膜的透过率高于 85 % .薄膜为多晶纤锌矿结构 ,垂直于衬底的C轴具有 [0 0 2 ]方向的择优取向 .重点探讨了薄膜的结构、光电性质与衬底所加负偏压的关系 .
The transparent conductive film of ZnO: Al (AZO) with high adhesion was prepared on water-cooled clear polyester film by RF bias magnetron sputtering. The minimum resistivity of the film was 1.11 × 10 -3 Ωcm. , The transmittance is higher than 85% .The thin film is polycrystalline wurtzite structure, and the C axis perpendicular to the substrate has the preferred orientation of [0 0 2] direction.The structure, the photoelectric properties and the substrate addition Negative bias relationship.