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光学系统在载荷的作用下会发生变形。基于干涉检验理论,提出了一种先调整后再拟合的处理方法。首先利用下山法计算光学镜面在法线方向的变形;然后利用Zernike多项式拟合变形曲面得到Zernike系数;最后去除刚体位移,作等高线图。新的数据处理方法可以更好的与干涉检验保持一致。对某相机的主镜进行仿真试验,结果表明,下山法计算效率较高,先调整后再拟合的处理结果与干涉检验结果的一致性较好。
Optical system will be under the action of load deformation. Based on the theory of interference test, a processing method of adjusting and then fitting first is proposed. First, the down-hill method is used to calculate the deformation of the optical mirror in the normal direction. Then, the Zernike coefficient is obtained by fitting the deformed surface with Zernike polynomial. Finally, the displacement of the rigid body is removed and the contour map is made. The new data processing method can be better consistent with the interference test. The simulation experiment of the main mirror of a camera shows that the downhill method has higher computational efficiency, and the reconciliation results of the first adjusted and the second reconstructed result are in good agreement with the interference test results.