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研制了一台校准范围为10~(-5)~10~5Pa的现场真空校准装置。将不同种类单一成分的校准气体引入装置上游室,通过几何尺寸为微米量级激光小孔的衰减,建立校准用标准压力p_(std)。上游室压力变化范围为1~10~3Pa,相应地,校准室内对应的标准压力范围10~(-5)~10~(-2)Pa(N2),测量不确定度为2.4%。另外,该装置可采用与标准真空计直接比较进行动态或静态校准,其极限真空度为10~(-6)Pa量级。对装置暴露大气后的抽气性能、静态压升及其主要计量特性进行了实验研究。实验结果表明,该装置外形尺寸以及质量分别为475 mm×420 mm×800 mm、37.8 kg,校准范围为1.9×10~(-5)~1.0×10~5Pa,相对合成标准不确定度为2.8%~0.40%。
A field vacuum calibration device with a calibration range of 10 ~ (-5) ~ 10 ~ 5Pa was developed. The calibration gas of different kinds of single components is introduced into the upstream chamber of the device, and the standard pressure p std for calibration is established through the attenuation of the geometrical size of the laser light in the micron order. The pressure in the upstream chamber ranges from 1 to 10 ~ 3Pa. Correspondingly, the standard pressure range of calibration chamber is 10 ~ (-5) ~ 10 ~ (-2) Pa (N2) and the measurement uncertainty is 2.4%. In addition, the unit can be dynamically or statically calibrated directly to a standard vacuum gauge with an ultimate vacuum on the order of 10 -6 Pa. The exhaust performance, static pressure rise and its main metrological characteristics after the device was exposed to the atmosphere were experimentally studied. The experimental results show that the dimensions and mass of the device are 475 mm × 420 mm × 800 mm and 37.8 kg, respectively. The calibration range is 1.9 × 10 -5 ~ 1.0 × 10 -5 Pa, and the relative standard deviation is 2.8 % ~ 0.40%.