评述了采用电调整微蚀刻试验表明,它适用于各种各样的线宽和间距的精细导线的制造。比起常规喷射蚀刻工艺来,其侧蚀小、蚀刻因子和tanθ高的效果。 Comments on the use of electrical adjustment micro-etching experiments show that it is suitable for a variety of line width and spacing of the fine wire manufacturing. Compared with the conventional spray etching process, its small side etching, etching factor and tan θ high effect.