随着重离子物理研究的开展及离子注入技术在材料科学方面的广泛应用,要求提供重离子和金属离子的品种日益增多。为此,在深入对Nielsen离子源研究的基础上,参照Danfysik 910型离子源研制成功了多功能、全离子化的820重离子源。由820重离子源获得的各种重离子束流已达30余种(表1),其中不少已在离子注入应用中得到可喜的结果。 With the development of heavy ion physics research and the extensive application of ion implantation technology in material science, there are more and more varieties of heavy ion and metal ions required. Therefore, based on the further research on Nielsen ion source, a multi-functional, fully ionized 820-ion ion source was developed with reference to the Danfysik 910 ion source. More than 30 different types of heavy ion beams have been obtained from the 820 heavy ion source (Table 1), many of which have yielded encouraging results in ion implantation applications.