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讨论了 CCD的主要特性及对宽带膜厚监控系统的影响 ,介绍了典型的 CCD数据采集系统。建立了一套基于 CCD的宽带膜厚监控系统 ,并对该系统进行了光谱标定及光谱补偿 ,给出了提高信噪比及减小非线性影响的处理方法。
The main characteristics of CCD and the influence on the monitoring system of broadband film thickness are discussed. A typical CCD data acquisition system is introduced. A broadband monitoring system based on CCD is established. The system is calibrated and compensated by spectrum. The processing method of improving the signal - noise ratio and reducing the nonlinear effect is given.