提出了一种基于聚二甲基硅氧烷(PDMS)薄膜的软模压印制作微透镜的方法。首先,采用具有钝化层的普通硅片作为基底加工出PDMS薄膜;然后,将薄膜粘于刻有对应孔径的硅模板上,薄膜在负压作用下产生凹陷,滴入快速固化的光固化树脂,固化后得到反向的模具作为制备微透镜结构的母板;最后,通过两次复制模具的方法,在PDMS上得到和母板一致的微透镜。实验测试了微透镜的厚度、焦距和成像效果,结果表明所得微透镜具有良好的表面形貌和聚光效果。这种制作方法可以极大地缩短微透镜的加工时间,并降低成本,为制作微透镜提供了一种简捷的方法。 A method of making micro-lens based on soft-mold printing of polydimethylsiloxane (PDMS) film is proposed. First, a conventional silicon wafer with a passivation layer was used as a substrate to fabricate a PDMS film; then, the film was stuck to a silicon template engraved with a corresponding aperture, the film was sunken under a negative pressure, dropped into a rapidly curing photocurable resin After curing, the reverse mold is obtained as the mother board for preparing the micro-lens structure. Finally, the micro-lens consistent with the mother board is obtained on the PDMS by duplicating the mold twice. The thickness, focal length and imaging effect of the microlens were experimentally tested. The results show that the microlens has good surface topography and light condensing effect. This manufacturing method can greatly shorten the processing time of the micro lens and reduce the cost, and provides a simple and convenient method for manufacturing the micro lens.