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目前激光直写膜电阻时,所加入的辅料容易造成杂质污染,膜的厚度和粗糙度难以降低。为减少杂质污染,降低膜厚和表面粗糙度,改善激光直写微电路性能,进行了透射式激光直写金属薄膜电阻的实验研究,分析了薄膜线宽与激光光斑能量分布特点的关系,获得了线宽低于光斑直径的导电薄膜。实验表明,扫描速度的增加或离焦量的降低会导致光斑重叠率和导线宽度减小。同时,过高的功率会使薄膜受到烧蚀破坏,功率过低则难以将靶材充分熔化附着在玻璃基板上。相比之下,锌膜颗粒尺寸较为均匀,而Al/Zn混合膜的颗粒尺寸不一致。
At present, laser writing film resistance, the added materials easily lead to impurity pollution, the film thickness and roughness is difficult to reduce. In order to reduce impurity pollution, reduce the film thickness and surface roughness, and improve the performance of the laser direct write microcircuit, the experimental study on the transmission laser direct write metal film resistance was carried out. The relationship between the film thickness and the laser spot energy distribution was analyzed. A conductive film with a line width lower than the spot diameter. Experiments show that the increase of the scanning speed or the decrease of the defocus amount will lead to the decrease of spot overlapping rate and the width of the wire. At the same time, too high power will make the film suffer from ablation, the power is too low, it is difficult to fully melt the target attached to the glass substrate. In contrast, the zinc film particles are more uniform in size, while the Al / Zn mixed film particles are not uniform in size.