三维坐标系测量数据与CAD模型的比对

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MEMS轮廓检验在实质上通常都是三维的,而所荻取的3D点云数据常常没有被充分利用.这种次优化的应用也正是由3D数据和3D模型的比对过程中存在的难点所引发的.给出了旨在减小3D数据分析负担的各种表达公式和接口定义的系统方法.对于中等尺度和大尺度的制品,这种系统方法均可应用.提出了分析三维坐标测量数据的计量学方法及相应的表达公式.这套公式提供了一种用于坐标测量过程分析的统一计算方法.也就是说这种计算系统是模块式的,把坐标系统定位和几何参数分析同等对待,包括除刚体运动以外的各种坐标变换.提出了以闭型偏差等式形式给出的各种几何学分析公式.另外,提出了旨在分析自由形状表面的各种专门公式,同时给出了这一处理过程的一个示例.
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