Epitaxial YBCO superconducting films were deposited on the single crystal LaAlO3. (001) substrate by metal organic deposition method. All YBCO films were fired at 820 ℃ in humidity range of 2.6%-19.7% atmosphere. Microstructure of YBCO thin films was ana-lyzed by means of X-ray diffraction (XRD) and scanning electron microscopy (SEM). Superconducting properties of YBCO films were measured by four-probe method. XRD results showed that the second phase (such as BaF2)and a-axis-oriented grains existed in the films prepared at 2.6% humidity condition; a-axis-oriented grains increased in the film prepared at higher than 4.2% humidity condition; almost pure c-axias-oriented grains existed in the films fired at 4.2% humidity condition. Morphologies of the YBCO films showed that all films had a smooth and crack-free surface. YBCO film prepared at 4.2% humidity condition showed Jc value of 3.3 MA/cm2 at 77 K in self-field.