大家知道,许多光学零件需要两个表面镀膜才能满足使用要求。如一些截止滤光片、分光镜等,需要把两种不同的膜系,分别镀在基片的两个表面,以实现各种不同的分光要求。又如最常见的透镜,必须两面镀以减反射膜,才能获得良好的成像质量及较高的透过率。通常的办法是,将零件置于真空室内先镀完一个表面,然后从真空室内取出再进行第二个表面的镀制。这种方法虽然有效,但时间长,效率低。以减反射膜为例:第一面镀制,需要从零件清洗、抽空、加温、镀制到冷却后取出工件,至少需要经过六、七小时,特别是大工件,需要的周期更长。在镀第二面时,又要重复这一工艺过程,镀完一个零件,往往要花费十几个小时的时间,因此,人们一直在设想由一次抽空后完成两面镀膜的办法。我们设计了一种真空镀膜翻转机构,经过实际生产考验,满足了上述要求,提高工效一倍左右,现将这一方法简述如下。 We all know that many optical components require two surface coatings to meet the requirements. For example, some cut-off filters, dichroic mirrors, etc., need two different film systems, respectively, plated on both surfaces of the substrate in order to achieve a variety of different spectral requirements. Another example is the most common lens, both sides must be coated with antireflection film, in order to obtain good image quality and high transmittance. The usual method is to place the part in the vacuum chamber and then remove it from the vacuum chamber before plating the second surface. Although this method is effective, it takes a long time and is inefficient. Take the antireflection film as an example: The first surface is plated and needs to be cleaned from the parts, evacuating, heating and plating to remove the workpiece after cooling. After at least six or seven hours, especially for large workpieces, the required period is longer. When the second side of the plate is plated, the process is repeated. After a part is plated, it usually takes more than a dozen hours. Therefore, it has been envisaged that the double-sided coating will be completed after one time of evacuation. We designed a vacuum coating flip mechanism, after the actual production test, to meet the above requirements, to improve work efficiency about double, now this method is briefly described below.