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介绍了大面阵偏振长波量子阱红外焦平面探测器组件的研制进展。在640×512规模20μm中心距面阵上,偏振焦平面采用了2×2子单元设计,子单元中每个像元分别刻蚀0°、90°、45°以及135°方向的一维线性光栅,来获得入射光不同偏振角度的信息。突破了长波量子阱材料外延和器件制备等关键技术,制备出面阵探测器芯片,实现了偏振长波红外探测的单片集成,配上杜瓦和制冷机,研制出噪声等效温差优于30m K的长波偏振640×512量子阱探测器组件。
The development of large area array polarization longwave quantum well infrared focal plane detector assembly is introduced. In the 640 × 512 size 20μm center-to-surface array, the polarization focal plane adopts a 2 × 2 sub-unit design. Each pixel in the sub-unit respectively etches one-dimensional linear directions of 0 °, 90 °, 45 ° and 135 ° Grating, to get the incident light of different polarization angle of information. Breaking the long wave quantum well material epitaxy and device preparation and other key technologies to prepare an array of detector chips to achieve long-wave polarization infrared detection of monolithic integration, coupled with Dewar and refrigerator, developed a noise equivalent temperature difference better than 30m K Long wave polarization 640 × 512 quantum well detector assembly.